11 Oxford Street
Cambridge, MA 02138
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A New 3D Laser Lithography capability at CNS: The Nanoscribe Photonic Professional GT
The new generation of Nanoscribe´s 3D laser lithography systems, Photonic Professional GT, provide a fast and powerful platform for 3D micro- and nanofabrication demands. Almost and arbitrarily defined complex polymer structures can be fabricated with feature sizes in the sub-micrometer range achieved by means of two-photon polymerization. A tremendous speed-up of the writing process is driven by an embedded ultra-high precision galvo technology, which laterally deflects the laser focus position by use of a galvanic mirror system. Thus, the fabrication of large area 3D micro- and nanostructures is now feasible in shortest time. In addition to rapid x-y-beam-scanning, a piezoelectric scanning stage provides ultra-precise x-y-z-movements of the substrate relative to the laser focus position - a proven feature retained from the Photonic Professional basic unit. Speed, precision and extraordinary resolution prove these 3D printers to serve as disruptive enablers for novel applications. The table-top laser lithography systems are fully automated. An intuitive, userfriendly software as integral part of an innovative workflow eases demanding tasks and secures their successful completion. Structures can either be designed in 3D printer compatible CAD software programs or directly implemented in Nanoscribe´s GWL scripting language. The software package features a fast interactive 3D preview of the printing output.
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Center for Nanoscale Systems (CNS), FAS Harvard University
11 Oxford Street, Cambridge, MA 02138
Phone: 617-384-7245